Key Benefits:

Building on the long-standing success of the Meridian family, the next-generation Meridian S Inverted Static Optical Fault Isolation System enables localization of electrical fault root causes.

FDx with Active Probe

• Next-gen static laser stimulation (SLS) amplifier for applications such as OBIRCH
• Higher sensitivity: picoamp level detectability
• Broader application space: expanded Forced Voltage and Forced Current ranges
• 4-Quadrant operability with the capability to run OBIRCH applications at positive and negative current and voltage
• New noise-cancellation architectures
• Proprietary Active Probe architecture for enhanced low-ohmic fault detection
• Lock-In capability supported across the entire SLS operation range up to 100 kHz

New probing architectures

• Static OFI analysis on a broad range of device architectures and package types
• Top-side micro-probing for flip chip packages and wafer pieces
• Backside micro-probing for conventionally packaged devices
• Dual-side probe card setup option enables electrical stimulation by rectangular or cantilevered probe cards
• Selectable eyepiece or CCD camera image navigation
 

Ease of Use

• Built upon the stability and maturity of Sierra Software
• Static OFI analysis: Smart defaults, automatic SLS channel selection, and easy-to-navigate GUI
• Photon Emission mode: Analysis tools such as Centroid feature, Background subtraction, Good die / Bad die analysis, Multi-tile mosaic and Live Emission mode
 

Laser Marker option

• Physical marking of a hotspot or fault location to enable fault redetection from EFA to PFA, without requiring the use of GDS CAD information
• Accuracy better than <2 μm
• Automated stage motion and multiple marking options